The cost of making chips at 100nm+, 90nm, 45nm, etc, is almost indifferent. It actually gets cheaper with smaller sizes because you can fit more chips in the same number of waffles.
The problem described by the article is that 10nm is already so small that we are hitting the barrier of what's physically possible.
The problem described by the article is that 10nm is already so small that we are hitting the barrier of what's physically possible.