450nm Laser Lithography using a Blu-ray optical head assembly (2012)(semanticscholar.org)
semanticscholar.org
450nm Laser Lithography using a Blu-ray optical head assembly (2012)
https://www.semanticscholar.org/paper/High-resolution%2C-low-cost-laser-lithography-using-a-Rothenbach-Gupta/4daf4b2b878204f9cfc2126cda0966655b000c63
Blu ray works with ~150nm dots
For comparison, a Cortex M0 is made with 180nm.
MEMS often use 350nm and larger.