That 200-250W is just just for minimum commercial viability, and that's the best that can be hoped for with the current drive lasers. Industry calls for four time that power, i.e. close to 1kW for sustainability.
For more than a decade, the Semicon industry has been trying to extend Moore's Law with CO2 laser technology that essentially has not had a generational advance since Moore's article was published. The laser wasn't the only issue, but now that those other barriers are being overcome, it will be the prime one. Far from acceptable cost-of-ownership, and inability to scale, have been known laser limiting factors from the beginning. That makes the hesitancy of companies, such as Intel, ASML/Cymer and Trumpf, to invest in CO2 laser breakthroughs that have been presented to them, more than shocking.
The minimum commercial viability of 250W EUV@IF (Intermediate Focus) has still not been achieved. There is no chance of them scaling to the 1kW EUV@IF that Intel has stated is needed for truly sustainable viability.